Calculation of Metal Coating Surface Capacity
Abstract
A comparative analysis of the labor intensity of calculation methods for complex metal coating surface capacity used in galvanic metallization technologies and micro-electromechanical systems has been kept under review. It is shown that in the 2D-approach the most effective method is the method of Monte Carlo. An algorithm has been developed to apply this method to calculate the capacity of a flat surface with the edge effects.
Keywords
galvanic metallization; flat surface capacities; edge effects
Galleys

References
References
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Доржиев В. Ю., Драгунов В. П., Остертак Д. И. Расчет емкости МЭМС в 2D-приближении : сб. науч. тр. НГТУ. - 2010. - № 4(62). - С. 73-80.
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