[1]
Gulyaev П. В., Shelkovnikov Ю. К., Kirillov А. И., and Ermolin К. С., “Features of the Application of Approach Actuators when Using Tunneling Microscope for Technological Surface Control”, Интеллект. сист. произв., vol. 16, no. 2, pp. 48–55, Jul. 2018.