РАСЧЕТ ЕМКОСТЕЙ МЕТАЛЛИЗИРУЕМЫХ ПОВЕРХНОСТЕЙ

Yu V Danilov; Yu G Podkin

Authors

Y. V. Danilov Sarapul Polytechnic Institute (branch of) Kalashnikov Izhevsk State Technical University
Y. G. Podkin Sarapul Polytechnic Institute (branch of) Kalashnikov Izhevsk State Technical University

Keywords:

galvanic metallization, flat surface capacities, edge effects

Abstract

A comparative analysis of the labor intensity of calculation methods for complex metal coating surface capacity used in galvanic metallization technologies and micro-electromechanical systems has been kept under review. It is shown that in the 2D-approach the most effective method is the method of Monte Carlo. An algorithm has been developed to apply this method to calculate the capacity of a flat surface with the edge effects.

Author Biographies

Y. V. Danilov, Sarapul Polytechnic Institute (branch of) Kalashnikov Izhevsk State Technical University

PhD in Engineering

Y. G. Podkin, Sarapul Polytechnic Institute (branch of) Kalashnikov Izhevsk State Technical University

DSc in Engineering, Professor

References

Zhu G., Packirisamy M., Hosseini M, Yves-Alain P. Modelling and control of an electrostatically actuated torsional micromirror // Journal Micromechanics and Microengineering. - 2006. - No. 16. - Pp. 2044-2052.

Доржиев В. Ю., Драгунов В. П., Остертак Д. И. Расчет емкости МЭМС в 2D-приближении : сб. науч. тр. НГТУ. - 2010. - № 4(62). - С. 73-80.